GL Science Thermal Desorption Product Range
Silicon Wafer Analyzer (SWA-256M)
GL Sciences understands the importance of these issues. That is why we have developed a Semiconductor Wafer Analyzer, SWA-256M (Manual Type). SWA-256M is an instrument that will analyze the organic compounds on the silicon wafer surfaces by thermal desorption gas chromatography.
- SWA-256M can analyze a silicon wafer in its complete form
- SWA-256M can identify and quantify the individual compound even if multiple organic compounds exist on the surface of the silicon wafer by utilizing gas chromatography
- SWA-256M can analyze contamination even if the compound on the surface is smaller than a few pg/cm2
- SWA-256M can heat a sample up to 700 C°
The sample line will not be decomposed or adsorbed.
Multi Sampling Thermal Desorption System
It is a measurement system for outgassing from materials. Sample (solid sample) is put into the heater oven of MSTD258M Manual type, START button switch, then it goes automatically to heat sample, trap outgas from the sample. After the sampling, remove the sample tube and attach it to a thermal desorption system TMD-253H or another to measure the tube.
Thermal Desorption Autosampler
It is available to continue running 6 sample tubes automatically. It can measure sample in wide range such as measurement of samples trapped into a sample tube from room atmosphere, cleanroom air or measurement of polymer materials put into a sample tubing directly.